CXsemi Company Limited
1F., No.15, Ziqiang 3rd Rd., Zhubei City, Hsinchu County
About us
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CXsemi was founded in 2010 to provide professional, efficient, and high quality technical service to our customers. Our specialty is in the sales and service of semiconductor inspection equipment, AOI, microscope,etc. Our corporate core values are integrity, efficiency, passion, and patience. We are a customer service driven company and we strive to bring best values to our customers. Our team is always extending our core technology to emerging applications and to meet more customers’ requirements. This is our way of creating long term values that would benefit our customer. In 2015, CXsemi provide three brand new vision model type rely on corporate with ITRI and Taiwan NTU and NTHU. |
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CXsemi was founded in 2010 to provide professional, efficient, and high quality technical service to our customers. Our specialty is in the sales and service of semiconductor inspection equipment, AOI, microscope,etc. Our corporate core values are integrity, efficiency, passion, and patience. We are a customer service driven company and we strive to bring best values to our customers. Our team is always extending our core technology to emerging applications and to meet more customers’ requirements. This is our way of creating long term values that would benefit our customer. In 2015, CXsemi provide three brand new vision model type rely on corporate with ITRI and Taiwan NTU and NTHU. |
Products
CD Overlay for semiconductor
Features
- Auto overlay & CD analysis
- Wide range for film thickness
- Adapt to Si, GaAs, SiC, glass wafer
- Merge 3D function for step height analysis
Specifications
- Robot handler, Pre-aligner, OCR, Secs/Gem
- Film range: upper than 30um, option
- Image Resolution/FOV: 0.11 μm/ 0.22 mm x 0.12 mm @50X
- Repeatability: better than 0.020um (include TIS error)
- Pattern: Box In Box, Bar to Bar, customized
- Data output: X/Y- shift, X/Y-Mag, X/Y- Rot, Shot Mag/Rot
Applications
- 5G, RF, Fingerprint Recognition, Power device
- Follow up Stepper or Aligner
Profiler
- Helps you to find the wafer warpage and stress for high reflective sample.
- Optical and non-contact measuring, does not damage your device.
- One shot image for the whole area, easy analysis.
- Substrate : Silicon, GaAs, Sapphire,
- Repeatability : <2um @3 sigma
- Measured speed : <5 sec/pc for 6” full field (> 0.19M data)
- Sample size : 12inch maximum
- Keyword : Wafer Warpage, Stress, Protrusion defect
Film thickness merotology
- Helps you to find the Film thickness, wafer thickness
- Optical and non-contact measuring, does not damage your device.
- We concentrate on the measurement of Photo Resistance thickness, that provides a flexible and customized UI design.
- Substrate : Silicon, GaAs, Sapphire, Glass, SiC
- Film material : Oxide, Nitride, PR, ITO…dielectric film
- Film thickness : Range 20nm-80 um, Repeatability<1 nm @ 500 nm Oxide on Si substrate
- Wafer thickness : Range 20 um ~ 775 um, Repeatability 0.1 um for 100 um Si wafer
- Via / Trench depth : AR>30 for CD 5 um Trench, Repeatability 0.2 um for 175um depth
- Wafer size : 12inch maximum
- Database : Built-in Template (n, k) & Multi-layer Model Setup
- Spot size : Φ 50 μm (option to 80 μm, 120 μm, 250 μm , 1.2 mm)
- Keyword : Via / Trench, Wafer thickness, Film thickness
AOI, front / back side wafer inspection system
- Transfer wafer to the stage of microscope automatically and then instead of manual operator.
- Front/back side macro inspection. Auto or Manual stage could be option. 2/4, 4/6, 6/8 inch & SiC, GaN…etc.
- Combine with famous brand microscope and also can install CCD for marco inspection.
Smart machine vision system
- Most customers cannot assess the operating quality of robot arms because the devices do not provide clear statistics regarding the quality of vibration or displacement deviation during arm movement.
- We provide a smart vision identification system to monitor product process or do the AI machine vision.
- Our vision software is easier to learn and operate than other suppliers.